Trek 646 Software-Driven Electrostatic Chuck Supply Description：

Datasheet

The Trek 646 software-driven electrostatic chuck supply offers an array of features that accommodate a variety of demanding applications. The instrument incorporates Advanced Energy technology which has demonstrated increased efficiency and throughput equal to three times that of other supplies. The versatile trusted performance of the Trek 646 allows for use in multiple unique tools and processes that eliminates the need to specify a new supply for each unique tool or process in a facility.

Features

Lockable front panel control interface

NIST-traceable calibration certificate provided with each unit

Supports both Coulombic and Johnsen-Rahbek ESC technologies

Upload and store electrostatic chuck profiles to the unit and stored internally via a user-friendly software interface

Wafer detection includes no-wafer, wafer-present or wafer-clamped status

Reduce backside gas errors, increases throughput, and eliminate sticky/popping wafer issues

Control parameters such as over-current, wafer-present, and wafer-clamped thresholds, clamp voltage, offset voltage and internal or external amplitude/offset control

Adjust in-process amplitude/offset and output-control versatility

Control output using the back panel I/O, serial computer command, or front panel controls

Configure for custom clamp and declamp sequences and wave shapes